ARGOS matrix 200 and 400
ARGOS is the most flexible solution on the market for the automatic surface inspection of precision optical components. It can be used to inspect a wide range of optical components from aspheres to mirrors. The ARGOS system also offers automated batch testing of multiple parts as well as simple testing of individual optics. The modular design allows the inspection range and resolution to be individually adapted to your application.
ARGOS matrix Models
ARGOS matrix 200
With our standard ARGOS matrix 200 table-top system, you can carry out a wide range of tests with just one device. From measuring individual components to entire batches of precision optics – you can make flexible use of the test area of 205 x 205 mm. ARGOS matrix 200 is available as a cleanroom-compatible model for use in ISO class 6 cleanrooms.
ARGOS matrix 400
ARGOS matrix 400 is our solution for measuring particularly large optics and series testing of even more optical components. Optics weighing up to 100 kg can be measured in a test area of 400 x 600 mm. The system is fully enclosed and has an integrated air filter. The ARGOS matrix 400 is suitable for use in ISO class 6 cleanrooms.
Modular Measurement Heads
The ARGOS systems can be equipped with different modular measuring heads (S/M/L) on delivery. The S measuring head is suitable for the highest resolution requirements. It can detect defects from 1 µm. With the L measuring head, on the other hand, test specimens can be tested automatically with a significant reduction in measuring time.
Technical Data
The modular design of the ARGOS systems makes it possible to choose between different measuring head variants. The resolution of the measuring head can be selected according to the inspection requirements and priorities in order to reliably detect even the smallest relevant defects or to optimize the measuring time.
| Measurement head configuration | Measurement head S | Measurement head M | Measurement head L |
|---|---|---|---|
| Nominal resolution (object-side pixel pitch) | 3.0 µm | 5.0 µm | 7.5 µm |
| Camera field of view | 13.7 mm × 13.7 mm | 22.4 mm × 22.4 mm | 33.6 mm × 33.6 mm |
| Smallest ISO 10110-7 size grade | 0.004 (digs), 0.0025 (scratches) | 0.0063 (digs), 0.004 (scratches) | 0.01 (digs), 0.0063 (scratches) |
| Smallest visible defects1/2 | < 1 µm | < 2 µm | < 3 µm |
| Reproducibility of the size measurement1/3 | < 1.5 µm | < 3 µm | < 4.5 µm |
| Inspection example: 8″ wafer4 | 12 min | 4 min | 2 min |
| Inspection example: Lens, D = 30 mm, R = 30 mm4 | 4 min | 2 min | 15 s |
| Datasheet | Datasheet |
2Smallest visible defects: Small defects will be assigned the minimum grade number 0.0025/0.004/0.0063.
3Reproducibility of the size measurement: Mean standard deviation of measured defect sizes for 30 repetitions with the same calibration sample.
4Inspection duration: The evaluation time depends on the specification and quality of the surface.
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